Vacuum Pump Inlet Trap Provides Solids Accumulation

The high-capacity MV Multi-Trap 12-in. vacuum inlet trap for semiconductor wafer manufacturing processes prevents heavy particulate byproducts from damaging pumps.

The vacuum inlet trap is made from stainless steel, has a large first stage knock-down baffle, and can be equipped with different port sizes and placement, and a wide range of filter elements. Ideal for LPCVD, PECVD, and ALD processes, it can be easily configured to a wafer manufacturer’s requirements and when stacked features four stages of filtration that are capable of up to 2,500 cu in. of solids accumulation.

Filtration options for the Vacuum Inlet Traps include 4.5- and 9-in. elements made of stainless steel gauze, copper gauze, polypropylene in 2, 5, and 20 micron sizes, Sodasorb, activated alumina, activated charcoal and molecular sieve, which are user selectable. Capable of trapping particulates and condensables, these high-capacity traps prevent accumulation in the foreline, throttle valve, and in dry vacuum pumps.

Mass-Vac Inc., No. Billerica, MA 978-667-2393 www.massvac.com

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